Microfabrication and nanomanufacturing / edited by Mark J. Jackson.

Contributor(s): Jackson, Mark JMaterial type: TextTextPublication details: Boca Raton, FL : CRC/Taylor & Francis, 2006Description: 401 p. : ill. ; 27 cmISBN: 0824724313 (Hardcover); 9780824724313Subject(s): Microelectronics | Integrated circuits -- Design and construction | Nanomanufacturing | Microelectromechanical systems -- Design and constructionDDC classification: 620/.5 LOC classification: TK7836 | .M523 2006Online resources: Table of contents only | Publisher description
Item type: Book
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Includes bibliographical references and index.

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