Microfabrication and nanomanufacturing /

Microfabrication and nanomanufacturing / edited by Mark J. Jackson. - Boca Raton, FL : CRC/Taylor & Francis, 2006. - 401 p. : ill. ; 27 cm.

Includes bibliographical references and index.

0824724313 (Hardcover) 9780824724313

2005049275

GBA571554 bnb

013279313 Uk


Microelectronics.
Integrated circuits--Design and construction.
Nanomanufacturing.
Microelectromechanical systems--Design and construction.

TK7836 / .M523 2006

620/.5