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MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu.

by Hsu, Tai-Ran.

Edition: 2nd ed.Material type: Text Text; Format: print ; Literary form: Not fiction Publication details: Hoboken, N.J. : John Wiley, c2008Online access: Table of contents only | Publisher description | Contributor biographical information Availability: Items available for loan: 1 Call number: 621.372.851/HSO.

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Introduction to microfabrication / Sami Franssila.

by Franssila, Sami.

Edition: 2nd ed.Material type: Text Text; Format: print ; Literary form: Not fiction Publication details: Chichester, West Sussex [England] : John Wiley & Sons, 2010Online access: Contributor biographical information | Publisher description | Table of contents only Availability: Items available for loan: 1 Call number: 621.372.85/FRA.

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Microfabrication and nanomanufacturing / edited by Mark J. Jackson.

by Jackson, Mark J.

Material type: Text Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL : CRC/Taylor & Francis, 2006Online access: Table of contents only | Publisher description Availability: Items available for loan: 1 Call number: 13457.

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