Plasma deposited thin films / editors, J. Mort, F. Jansen.

Contributor(s): Mort, J | Jansen, F. (Frank), Ph. DMaterial type: TextTextPublication details: Boca Raton, Fla. : CRC Press, c1986Description: 245 p. : ill. ; 27 cmISBN: 0849351197Subject(s): Thin film devices | Vapor-plating | Plasma engineeringDDC classification: 621.381/7 LOC classification: TK7872.T55 | P57 1986
Item type: Book
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