Ion implantation in semiconductors :

Ion implantation in semiconductors : science and technology : [proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974] / edited by Susumu Namba. - New York : Plenum Press, [1975] - xv, 742 p. : ill. ; 26 cm.

Includes bibliographical references and indexes.

030630841X

75008985


Ion implantation--Congresses.
Semiconductors--Effect of radiation on--Congresses.
Metals--Effect of radiation on--Congresses.

TK7871.85 / .I5762 1974

621.3815/2/028