Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988 / edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International.

By: Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications (1988 : Atlanta, Ga.)Contributor(s): Hochman, Robert F. (Robert Francis), 1928- | Solnick-Legg, Hillary | Legg, Keith O | ASM International. Ion Implantation Committee | ASM International. Plasma Processes CommitteeMaterial type: TextTextPublication details: Metals Park, Ohio : ASM International, c1988Description: ix, 205 p. : ill. ; 29 cmISBN: 0871703300Subject(s): Ion implantation -- Congresses | Ion bombardment -- Industrial applications -- Congresses | Plasma (Ionized gases) -- Industrial applications -- Congresses | Metals -- Finishing -- CongressesDDC classification: 671.73 LOC classification: TS695.25 | .C66 1988
Item type: Book
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621.039.64/HOC (Browse shelf (Opens below)) Available 8423

Includes bibliographical references.

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