Introduction to microfabrication / Sami Franssila.

By: Franssila, SamiMaterial type: TextTextPublication details: Chichester, West Sussex [England] : John Wiley & Sons, 2010Edition: 2nd edDescription: xiv, 518 p. : ill. ; 26 cmISBN: 9780470749838Subject(s): Microelectromechanical systems | Electronic apparatus and appliances | MicrofabricationDDC classification: 621.381 LOC classification: TK7875 | .F73 2010Online resources: Contributor biographical information | Publisher description | Table of contents only
Item type: Book
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621.372.85/FRA (Browse shelf (Opens below)) Available 13459

Includes bibliographical references and index.

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