Ion implantation in semiconductors : science and technology : [proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974] / edited by Susumu Namba.

By: (4th : International Conference on Ion Implantation in Semiconductors and Other Materials (4th : 1974 : Osaka, Japan)Contributor(s): Namba, Susumu, 1928-Material type: TextTextPublication details: New York : Plenum Press, [1975]Description: xv, 742 p. : ill. ; 26 cmISBN: 030630841XSubject(s): Ion implantation -- Congresses | Semiconductors -- Effect of radiation on -- Congresses | Metals -- Effect of radiation on -- CongressesDDC classification: 621.3815/2/028 LOC classification: TK7871.85 | .I5762 1974
Item type: Book
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