| 000 | 01465cam a22003734a 4500 | ||
|---|---|---|---|
| 001 | 14000739 | ||
| 003 | I11T | ||
| 005 | 20161104104139.0 | ||
| 008 | 050613s2006 flua b 001 0 eng | ||
| 010 | _a 2005049275 | ||
| 015 |
_aGBA571554 _2bnb |
||
| 016 | 7 |
_a013279313 _2Uk |
|
| 020 | _a0824724313 (Hardcover) | ||
| 020 | _a9780824724313 | ||
| 035 | _a(OCoLC)ocm60664422 | ||
| 040 |
_aDLC _cDLC _dBAKER _dUKM _dC#P _dDLC |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7836 _b.M523 2006 |
| 082 | 0 | 0 |
_a620/.5 _222 |
| 245 | 0 | 0 |
_aMicrofabrication and nanomanufacturing / _cedited by Mark J. Jackson. |
| 260 |
_aBoca Raton, FL : _bCRC/Taylor & Francis, _c2006. |
||
| 300 |
_a401 p. : _bill. ; _c27 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 | _aNanomanufacturing. | |
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 700 | 1 | _aJackson, Mark J. | |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/fy0702/2005049275.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0703/2005049275-d.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
||
| 942 |
_2udc _cBK |
||
| 999 |
_c18815 _d18815 |
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