TY  - BOOK
AU  - Jackson,Mark J.
TI  - Microfabrication and nanomanufacturing
SN  - 0824724313 (Hardcover)
AV  - TK7836 .M523 2006
U1  - 620/.5 22
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Nanomanufacturing
KW  - Microelectromechanical systems
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/fy0702/2005049275.html
UR  - http://www.loc.gov/catdir/enhancements/fy0703/2005049275-d.html
ER  -