TY  - BOOK
AU  - Namba,Susumu
ED  - International Conference on Ion Implantation in Semiconductors and Other Materials
TI  - Ion implantation in semiconductors: science and technology : [proceedings of the fourth International Conference on Ion Implantation in Semiconductors and Other Materials, held at the Osaka Chamber of Commerce and Industry, August 1974] 
SN  - 030630841X
AV  - TK7871.85 .I5762 1974
U1  - 621.3815/2/028 
PY  - 1975///]
CY  - New York
PB  - Plenum Press
KW  - Ion implantation
KW  - Congresses
KW  - Semiconductors
KW  - Effect of radiation on
KW  - Metals
N1  - Includes bibliographical references and indexes
ER  -