TY  - BOOK
AU  - Mort,J.
AU  - Jansen,F.
TI  - Plasma deposited thin films
SN  - 0849351197
AV  - TK7872.T55 P57 1986
U1  - 621.381/7 19
PY  - 1986///
CY  - Boca Raton, Fla.
PB  - CRC Press
KW  - Thin film devices
KW  - Vapor-plating
KW  - Plasma engineering
N1  - Includes bibliographies and index
ER  -